Micron-sized devices designed to sense or manipulate the physical world

Amkor is a world leader in microelectronic packaging technologies and the largest outsource provider of microelectromechanical systems (MEMS) and micro optical electronic mechanical systems (MOEMS). Our MEMS/sensors are packaged for accelerometers, gyroscopes, magnetometers, microphones and sensors including pressure, temperature, infrared, biomedical, chemical and gas.

MEMS are micron-size devices that can sense or manipulate the physical world. MEMS are created using micro machining processes, similar to those used to produce integrated circuit IC devices. This allows a two- or three-dimensional mechanical system to be created in the same small area typical of an IC device. Since the fab process is similar to IC fabrication, MEMS are typically created on silicon wafers, but can also use other substrate types as well. Due to size, tens of thousands of these devices can be fabricated on a single wafer.

Value of Amkor’s MEMS Manufacturing

  • Standard platforms = faster development
  • Faster introduction of new products
  • Lower development cost
  • Amkor MEMS experience
  • Dedicated MEMS team
  • Constantly updating the MEMS toolbox with investments on new equipment and materials and leveraging other core technologies like TSV, Cu Pillar
  • In-house test development capability


Contact an Amkor expert by clicking the request info button below.